CVD Equipment
TCVD-RF100CA
Thermal Chemical Vapor Deposition
The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
Size
2300(W) x 1770(H) x 750(D)
Features
Size (mm) : 2300(W) x 1770(H) x 750(D)
Up to 10 gases 3 MO sources for gas-phase synthesis.
Motor-controlled movable heater for fast heating cooling (patented).
Fully computer-controlled programmable recipes.
TCVD100 platform : Proven performance for ~100 systems for more than 5 years.
Invited training for full sample preparation processes.
*Price will be determined after consultation. (Different customization from the standard parts will affect the overall price.)
Up to 10 gases 3 MO sources for gas-phase synthesis.
Motor-controlled movable heater for fast heating cooling (patented).
Fully computer-controlled programmable recipes.
TCVD100 platform : Proven performance for ~100 systems for more than 5 years.
Invited training for full sample preparation processes.
*Price will be determined after consultation. (Different customization from the standard parts will affect the overall price.)
Advantage
Specifications
Thermal CVD Semi-auto Operation system
Both End chamber(Stainess) - All parts cooling by water
Quartz Main chamber
Gas control unit ( Mass flow controller) - 3channel standard
340liter/min Oil rotary pump
Pneumatic On/off valve with Auto pressure control Throttle valve
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
System Program ( Auto processing system)
Safety Cover ( Connected exhaust system )
High Vacuum processing (Pump/Gauge/valve unit)
RF plasma ( ICP type )
Both End chamber(Stainess) - All parts cooling by water
Quartz Main chamber
Gas control unit ( Mass flow controller) - 3channel standard
340liter/min Oil rotary pump
Pneumatic On/off valve with Auto pressure control Throttle valve
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
System Program ( Auto processing system)
Safety Cover ( Connected exhaust system )
High Vacuum processing (Pump/Gauge/valve unit)
RF plasma ( ICP type )
Options
Max temp 1500℃ Furnace by SIC source
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addtion total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Safety interlock system(Water / Air/gas leak)
Tungsten filament gas source cracking
Additional Furnace for source evaporation
High Vacuum processing option (Pump/Gauge/valve unit)
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addtion total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Safety interlock system(Water / Air/gas leak)
Tungsten filament gas source cracking
Additional Furnace for source evaporation
High Vacuum processing option (Pump/Gauge/valve unit)
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
Consumable Parts
K-type Thermocouple (Option : R-type)
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
Facility Requirements
Electrical power |
220VAC 1ph 40A |
Compressed air |
0.5~0.6Mpa |
Compressed air input size |
6 mm one touch fitting |
Cooling water in/out |
3/8" lok fitting |
cooling water flow |
Air temp 5~7liter/min |
cooling water pressure |
0.1~0.2Mpa |
Safety exhaust size |
6 mm one touch tube |
Gas input pressure |
40psi |
Gas port |
10ch standard (Option 2ch Expansion) |
Gas port Size |
1/4"lok fitting |
Pump exhaust |
NW25 |
Rotary pump capacity |
340liter/min |
Vent |
1/4"lok fitting |
Dry pump exhaust |
NW16 |
Dry pump capacity |
250liter/min |
Cold trap LN2 port |
NW16 |
Customer List
| ETH IBM Lab | Seoul National University |
| Israel |
Layout
Quality Assurance
Graphene Square provides customers who purchase equipment with a one-year warranty on all accessories (except quartz glass and rubber O-rings).
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
Delivery period
All equipment that has been manufactured and inspected will be delivered on the same day to the place you have designated.
Equipment Purchase Process
01
Quotation Request
Quotation Request and Quotation provided
02
Confirmation of intention to purchase
Customer's intention to purchase
(Purchase Order from Customer)
03
Invoice / Payment
Provide Invoice and Payment data
04
Provide Production • Training program
Provide machine production and training program upon completion of the first deposit
05
Equipment Operation Test /
Product packaging, Shipment
After production is completed, product packaging and shipping are carried out
06
Arrival is completed
Arrival is completed at the customer site
within up to 4 days