CVD Equipment
TCVD-DC100CA
Premium Custom Design Dual CVD System with a Glove Box
Chemical vapor deposition (CVD) system for the syntheses of 2D materials at scales from a chip to a wafer,
including the synthesis of graphene, h-BN, TMDCs on various substrates by use of gas-phase or solid precursors
and metal-organic (MO) sources. The glove box enables the synthesis of various air-sensitive TMDCs.
Chemical vapor deposition (CVD) system for the syntheses of 2D materials at scales from a chip to a wafer,
including the synthesis of graphene, h-BN, TMDCs on various substrates by use of gas-phase or solid precursors
and metal-organic (MO) sources. The glove box enables the synthesis of various air-sensitive TMDCs.
Thermal Chemical Vapor Deposition
The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
Size
3000 (W) x 1800 (H) x 750 (D)
Features
Size (mm): 3000 (W) x 1800 (H) x 750 (D)
Up to 10 gases and 3 MO sources for gas-phase synthesis.
Motor-controlled movable heater for fast heating and cooling (patented).
Fully computer-controlled programmable recipes.
TCVD100 platform: Proven performance for ~150 systems for more than 10 years.
Invited training for full sample preparation processes from synthesis, etching, and transfer.
Supply of high-quality source materials.
1 year warranty included (2 year extended).
CVD chambers connected to a Glove Box. Free from air exposure.
Up to 10 gases and 3 MO sources for gas-phase synthesis.
Motor-controlled movable heater for fast heating and cooling (patented).
Fully computer-controlled programmable recipes.
TCVD100 platform: Proven performance for ~150 systems for more than 10 years.
Invited training for full sample preparation processes from synthesis, etching, and transfer.
Supply of high-quality source materials.
1 year warranty included (2 year extended).
CVD chambers connected to a Glove Box. Free from air exposure.
Specifications
| Reactor |
Tube type 4 inch diameter quartz. Connected to a glove box. |
|---|---|
| Substrate Size |
Lateral insertion of 10 mm to < 4 inch wafers possible (Loading frames for small samples). Rolled metallic foils can be loaded to synthesize A4 sized or larger 2D materials. |
| Furnace |
Dual-zone heater and controller for graphene/h-BN synthesis. Single-zone precursor heater and Dual-zone deposition heater for TMDC synthesis. The heaters are movable along two rails and the distance can be motor-controlled. Remote RF Plasma Module. |
| Base Pressure | 10⁻⁵ mbar (depending on the dryness of source). |
| Operating Pressure | 10⁻³ mbar ~ 1 bar |
| Precursor |
Max 10 gas lines (ex. CH₄, B₂H₆, Ar, H₂, O₂, etc.) Metal oxide sources of various transition metals placed in Heat Zone 1 for solid source growth. |
| Other metal organic (MO) sources | Extra 3 metal-organic source injection ports are included. (ex Mo(CO)₆, Fe(CO)₅) |
| Flow control |
Precursor gases: 0.1 ~ 10 sccm Other gases: 10 ~ 1000 sccm Automatic flow control. |
| Vacuum |
Cold trap for residual sources. Turbo pump 450 l/s (ISO160) < 10⁻⁶ mbar. Dry scroll pump < 10⁻¹ mbar. Main gate valve pneumatic type / fore-line / roughing angle valve / foamed bellows. By-pass pumping adaptor, clamp & centering. |
| System Control |
Control PC system. Serial network module. Remote IO Module. System base programming / System recipe control module / System date file save module. Software upgrade support. |
Customer List
| Seoul National University Graphene Research Center | Israel Institute of Technology |
| Duke University |
Quality Assurance
Graphene Square provides customers who purchase equipment with a one-year warranty on all accessories (except quartz glass and rubber O-rings).
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
Delivery period
All equipment that has been manufactured and inspected will be delivered on the same day to the place you have designated.
Equipment Purchase Process
01
Quotation Request
Quotation Request and Quotation provided
02
Confirmation of intention to purchase
Customer's intention to purchase
(Purchase Order from Customer)
03
Invoice / Payment
Provide Invoice and Payment data
04
Provide Production • Training program
Provide machine production and training program upon completion of the first deposit
05
Equipment Operation Test /
Product packaging, Shipment
After production is completed, product packaging and shipping are carried out
06
Arrival is completed
Arrival is completed at the customer site
within up to 4 days