CVD Equipment
TCVD-100A
Thermal Chemical Vapor Deposition
The main Thermal CVD technology involves adding gases to the pressurized reactor at high temperature of about 1,000℃ where thin film is synthesized onto substrates.
Size
1750(W) X 1585(H) X 750(D)
Features
Size(mm): 1750(W) x 1585(H) x 750(D)
Advanced Semi-Auto System
Optimized for graphene, CNT growth
Water-cooled end chambers doors.
Process Temperature: ~1,100℃
Uniformity of Film Thickness: ≤+-3%
Testing Uniformity: ≤+-3%
Movable furnace method is our unique knowhow for fast heating
fast cooling of the sample
Standard safety box
* Price will be determined after consultation. (Different customization from the standard parts will affect the overall price.)
Advanced Semi-Auto System
Optimized for graphene, CNT growth
Water-cooled end chambers doors.
Process Temperature: ~1,100℃
Uniformity of Film Thickness: ≤+-3%
Testing Uniformity: ≤+-3%
Movable furnace method is our unique knowhow for fast heating
fast cooling of the sample
Standard safety box
* Price will be determined after consultation. (Different customization from the standard parts will affect the overall price.)
Advantage
Specifications
Thermal CVD Semi-auto Operation system
End chambers (stainless steel) - water cooled system
Gas control unit ( Mass flow controller) - 3channel standard + 1 spare
340liter/min Oil rotary pump
Pneumatic On/off valve with Down stream Auto pressure control Throttle valve with controller
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
Safety Cover (Connected exhaust system)
Safety interlock system(Water / Air)
End chambers (stainless steel) - water cooled system
Gas control unit ( Mass flow controller) - 3channel standard + 1 spare
340liter/min Oil rotary pump
Pneumatic On/off valve with Down stream Auto pressure control Throttle valve with controller
Programmable Temperature controller
High Temperature Furnace(Max1200℃)
Rapid Cooling system by furnace moving
Atmospheric and Vacuum Processing
Anti-contamination system by inner tube
Vacuum gauge unit(Capacitance/Convectron)
1 year warranty
On-site install and training
Safety Cover (Connected exhaust system)
Safety interlock system(Water / Air)
Options
Max temp 1500℃ Furnace by SIC source
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addition total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Gas Safety interlock system for gas leak
RF plasma ( ICP type )
Tungsten filament gas source cracking
Additional Furnace for source evaporation
High Vacuum processing option (Pump/Gauge/valve unit)
Installation in Fume hood
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
System Program ( Auto processing system)
Rapid thermal processing furnace by IR lamp source
MF power induction heating process Max temp 1600℃
MFC(Mass flow controller) addition total 12channel
Dry vacuum pump ( Scroll / booster / industry)
Gas Safety interlock system for gas leak
RF plasma ( ICP type )
Tungsten filament gas source cracking
Additional Furnace for source evaporation
High Vacuum processing option (Pump/Gauge/valve unit)
Installation in Fume hood
Source delivery system ( Bubbler / Gas / Solid )
System Utility ( Chiller / scrubber / gas cabinet )
System Program ( Auto processing system)
Consumable Parts
K-type Thermocouple (Option : R-type)
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
Furnace heating element (Furnace repair)
Vacuum sensor
Oil in Rotary Oil Pump
O-ring
Quartz tube
Facility Requirements
Electrical power |
220VAC 1ph 30A (35A for +1 furnace) |
Compressed air |
0.5~0.6Mpa |
Compressed air input size |
6 mm one touch fitting |
Cooling water in/out |
3/8" lok fitting |
Cooling water pressure |
0.1~0.2Mpa |
Safety exhaust size |
6 mm one touch tube |
Gas input pressure |
40psi |
Gas port |
4ch standard (Option 2ch Extension) |
Gas port size |
1/4"lok fitting |
Pump exhaust |
NW25 |
Rotary pump capacity |
340liter/min |
Vent |
1/4"lok fitting |
Customer List
| Micro Photonics | Harvard University |
| KAUST | Oxford University |
| NTNU Nano Lab | University of Texas |
| CNR IMIP of Bari University Lab | Cambridge University Lab |
| FHNW | Tech University of Korea |
| Israel | GIST |
Layout
Quality Assurance
Graphene Square provides customers who purchase equipment with a one-year warranty on all accessories (except quartz glass and rubber O-rings).
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
If you find a part abnormality or system error in your equipment within the period, please contact us immediately and a repairman will be dispatched immediately within 24 hours.
Delivery period
All equipment that has been manufactured and inspected will be delivered on the same day to the place you have designated.
Equipment Purchase Process
01
Quotation Request
Quotation Request and Quotation provided
02
Confirmation of intention to purchase
Customer's intention to purchase
(Purchase Order from Customer)
03
Invoice / Payment
Provide Invoice and Payment data
04
Provide Production • Training program
Provide machine production and training program upon completion of the first deposit
05
Equipment Operation Test /
Product packaging, Shipment
After production is completed, product packaging and shipping are carried out
06
Arrival is completed
Arrival is completed at the customer site
within up to 4 days